Brooks automation manuals

User Manual Brooks Automation Revision A 1Introduction The Jet system is intended for use by industrial customers and should be serviced only by Brooks or Brooks trained representatives. The service manuals and related. The information included in this manual is Brooks Proprietary Information and is provided for the use of Brooks’ customers only and cannot be used for distribution, reproduc- tion, or sale without the express written permission of Brooks Automation. Operation Manual Brooks Automation Revision A Information provided within this document is subject to change without notice, and although believed to be accurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.

SMIF Load Port Transfer (LPT) The SMIF-LPT (Load Port Transfer) is an ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of mm and mm wafer processing and metrology tools. The SMIF-LPT is designed for adaptive and equipment manufacturer applications for vacuum load-lock tools. The Brooks Service ToolTM is a Windows® - based application that provides expanded control of Brooks QUANTIM® QMA and QMB Mass Flow Control (MFC) devices for servicing tasks that include setup and configuration, troubleshooting, and tuning. We recommend that you read this manual in its entirety as this will enable efficient and proper. Brooks Automation Revision General The manual provides instructions for installing, operating and servicing the Compressor. This compressor is available in two versions: air-cooled, part number G/G and water cooled, part number G/G

System data logging and automation interface Quickly find your samples using FreezerPro, whether they are stored in manual and/or an automated store. All other trademarks are properties of their respective owners. © Brooks Automation, Inc. All Rights Reserved. The information included in this manual is. The information included in this manual is proprietary information of. Brooks Automation, Inc. and is provided for the use of Brooks customers only and.